EN
Description
Semiconductor grade silicon carbide wafer boat is a high-performance ceramic product mainly used in semiconductor diffusion processes.
Specifications
KCE® SiSiC/RBSiC Technical Data Sheet
| Technical Parameters | Unit | Value |
| Silicon Carbide content | % | 85 |
| Free Silicon content | % | 15 |
| Bulk Density 20°C | g/cm³ | ≥3.02 |
| Open Porosity | Vol % | 0 |
| Hardness HK | kg/mm² | 2600 |
| Flexural Strength 20°C | MPa | 250 |
| Flexural Strength 1200°C | MPa | 280 |
| 20 – 1000°C (Coefficient of Thermal Expansion) | 10–6 K–1 | 4.5 |
| Thermal Conductivity 1000°C | W/m.K | 45 |
| Static 20°C(Modulus of Elasticity ) | GPa | 330 |
| Working temperature | °C | 1300 |
| Max. Service Temp (air) | °C | 1380 |
Applications
Silicon carbide (SiC) wafer boat is a high-temperature resistant component used in furnace tubes to load wafers for high-temperature treatment. Due to its high temperature resistance, chemical corrosion resistance, and good thermal stability, silicon carbide materials are widely used in various heat treatment processes such as diffusion, oxidation CVD, Annealing, etc. Semiconductor grade silicon carbide wafer boat is a high-performance ceramic product mainly used in semiconductor diffusion processes and is an indispensable tool in the semiconductor manufacturing process.
Advantages
Compared with traditional quartz wafer boats, semiconductor grade silicon carbide crystal boats have the characteristics of wear resistance, corrosion resistance, high temperature impact resistance, resistance to plasma bombardment, high temperature bearing capacity, high thermal conductivity, high heat dissipation, and long-term use without easy bending and deformation. Under high temperature conditions, silicon carbide wafer boats are not easily deformed or broken, ensuring the stability and yield of wafer manufacturing. In addition, the service life of silicon carbide wafer boats is longer, reducing replacement frequency and maintenance costs, bringing greater economic benefits to semiconductor enterprises.
