EN
Description
Silicon carbide wafer boat is a high-temperature resistant component used in furnace tubes to load wafers for high-temperature treatment. Due to its high temperature resistance, chemical corrosion resistance, and good thermal stability, they are widely used in various heat treatment processes such as diffusion, oxidation CVD, Annealing, etc.
Specifications
KCE® SiSiC/RBSiC Technical Data Sheet
| Technical Parameters | Unit | Value |
| Silicon Carbide content | % | 85 |
| Free Silicon content | % | 15 |
| Bulk Density 20°C | g/cm³ | ≥3.02 |
| Open Porosity | Vol % | 0 |
| Hardness HK | kg/mm² | 2600 |
| Flexural Strength 20°C | MPa | 250 |
| Flexural Strength 1200°C | MPa | 280 |
| 20 – 1000°C (Coefficient of Thermal Expansion) | 10–6 K–1 | 4.5 |
| Thermal Conductivity 1000°C | W/m.K | 45 |
| Static 20°C（Modulus of Elasticity ) | GPa | 330 |
| Working temperature | °C | 1300 |
| Max. Service Temp (air) | °C | 1380 |
Applications
In the field of new energy photovoltaics, silicon carbide ceramic materials are gradually becoming a key carrier in the manufacturing process of solar cells, such as boat carriers, boat boxes, and pipe fittings, and their market demand continues to rise. In the new energy industry of photovoltaics and electronics, silicon carbide kiln furniture is used as a transmission component for diffusion furnaces and sintering furnaces to ensure stable material properties at high temperatures. In the field of new energy vehicles, silicon carbide ceramic kiln furniture is applied in the sintering and heat treatment processes of positive and negative electrode materials and electrolytes for lithium-ion batteries, which improves kiln production capacity and reduces energy consumption.
Silicon carbide crystal boats are applied in the photovoltaic industry. In the manufacturing process of photovoltaic cells, silicon carbide crystal boats are mainly used to carry silicon wafers, ensuring their stability and uniform heating during processing. Due to the high thermal conductivity of silicon carbide crystal boats, they can effectively conduct heat away from silicon wafers, preventing them from being damaged due to overheating. In addition, the chemical stability of silicon carbide crystal boats can also ensure that they will not undergo chemical reactions with silicon wafers or other materials during processing, thereby affecting the performance of photovoltaic cells.
Advantages
With its characteristics of high temperature resistance, corrosion resistance, and good thermal conductivity, it plays a key role in the fields of new energy photovoltaics and new energy vehicles.
Compared with traditional quartz crystal boats, silicon carbide crystal boats have higher thermal stability and mechanical strength. Under high temperature conditions, silicon carbide crystal boats are not easily deformed or broken, ensuring the stability and yield of photovoltaic cell manufacturing. In addition, the service life of silicon carbide crystal boats is longer, reducing replacement frequency and maintenance costs, bringing greater economic benefits to photovoltaic enterprises.
